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Our engineering & Master degrees
Our engineering & Master degrees

> Studies

CAD for microsystems - 4PMTMSD2

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  • Number of hours

    • Lectures : 12.0
    • Tutorials : 8.0
    • Laboratory works : 8.0
    • Projects : ?
    • Internship : ?
    ECTS : 2.0

Goals

The course will give basic principles of micro-electromechanical systems modelling. Starting from microsystem simple mechanical elements, the course will develop the modelling of more complex structures including electromechanical transducers. Approaches to reduced-order modelling of complex microstructures will be explained and the electromechanical and electroacoustic analogies will be studied in detail. Basic electromechanical transduction mechanisms will be described; their analogy models will be developed and applied to examples of real microsystems. Among the transduction mechanisms will be both reciprocal principles as electrostatic, piezoelectric, electromagnetic and electrodynamic, and non-reciprocal principles as piezoresistive and thermomechanical.

Contact Libor RUFER

Content

1. Introduction
2. Continuous mechanical systems – static behavior
3. Continuous mechanical systems – dynamic behavior
4. Discrete systems: electro-mechanical and electro-acoustic analogies
5. Acoustic elements - air damping
6. Electro-mechanical transducers modeling: electrostatic transduction
7. Piezoelectric transduction
8. Electromechanical transduction with magnetic field
9. Non-reciprocal transducers - Piezoresistive transduction



Prerequisites

Solid background in general physics

Tests

Semester 8 - The exam is given in english only 

Numerical exercises on the course topics



Additional Information

Semester 8 - This course is given in english only EN

Curriculum->NANOTECH->Semester 8

Bibliography

TIMOSHENKO, S. P., GOODIER, J. N., Theory of Elasticity, Mc Graw-Hill, 1970.
GERE, J.M., Mechanics of Materials, Brooks/Cole, Thomson Learning, 2001, 926 pp.
SENTURIA, S. D., Microsystem Design, Kluwer Academic Publishers, 2001, 689 pp.
BAO, M. H., Micro Mechanical Transducers, Elsevier, 2000, 378 pp.

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Date of update March 13, 2019

Grenoble INP Institut d'ingénierie Univ. Grenoble Alpes