Number of hours
- Laboratory works 24.0
ECTS
ECTS 2.0
Goal(s)
During this practice, the students will modelize, realize and characterize electronic devices.
Contact Alice CAPLIERContent(s)
The practice is made of three 8 hours periods :
- Silvaco simulation (8h) :
It aims to modelize the process flow leading to transistors
- Clean room (8h) :*
It aims in fabricating capacities and diodes, discovering the main technology processes : - thermal treatments (annealing, oxidation)
- deposit techniques (sputtering, evaporation)
- photolithography
- dry and wet etching
- Characterization (8h) :*
During this session, the devices fabricated in clean-room will be characterized : - current-voltage measurement on PN diodes and MOS transistors
- capacity-voltage measurement on MOS capacities
- physical and electrical parameters extraction
Prerequisites
Module "Technologie des dispositfs"
4PMBTDS9
Test
For each session a short report explaining results obtained is asked.