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Electrochemistry for microsystems - 5PMPELM1

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  • Number of hours

    • Lectures : 12.0
    • Tutorials : 12.0
    • Laboratory works : 0
    • Projects : 0
    • Internship : 0
    • Written tests : 0
    ECTS : 2.0

Goals

The aim is to show how electrochemistry is used in the microelectronics industry. Electrochemical deposition processes are more specifically described, to illustrate how electrochemical processes can be advantageously used to tackle specific challenges in micro- and nanofabrication.

Contact Paul-Henri HAUMESSER

Content

A - Micro- and nanotechnologies (4h CM)

  • AI - History and evolution of microelectronic devices
  • AII - Overview of the various processes for micro- and nanofabrication

B - Electrochemical deposition processes (8h CM)

  • BI - Copper electroplating
  • BII - Electroless deposition

C - Practical sessions (12h TD)
Small groups of 3-4 students work together on case studies based on works reported in the literature. Each team works on a specific theme, establishing first its state-of-the-art, then focusing on a critical analysis of a few publications or patents



Prerequisites

Good knowledge of the fundamental thermodynamics and kinetics of electrochemical reactions.

Tests

Written report and oral presentation of the subject selected for the practical sessions.



La note prend en compte le travail de groupe (qualité du rapport et de la présentation), mais aussi la participation et l'implication de chaque étudiant(e)

Additional Information

This course brings 3.0 ECTS to students in EU of choice (EPEE ELP S9)

This course brings 3.0 ECTS to students in EU Electrochemistry (EPEE ELP S9)

Curriculum->EPEE->Semester 9
Curriculum->Master Electrochimie et Procédés->Semester 9
Curriculum->Master->Semester 9
Curriculum->Double-Diploma Engineer/Master->Semester 9
Curriculum->Double Diploma EPEE - ELECTROCH->Semester 9

Bibliography

Haumesser, P.-H. Nucleation and Growth of Metals; Haumesser, P.-H., Ed.; Elsevier: Oxford, 2016.

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Grenoble INP Institut d'ingénierie Univ. Grenoble Alpes