Aller au menu Aller au contenu
Our engineering & Master degrees


School of engineering in Physics, Applied Physics, Electronics & Materials
Science

Our engineering & Master degrees
Our engineering & Master degrees

> Studies

MEMS - 5PMRMEM6

A+Augmenter la taille du texteA-Réduire la taille du texteImprimer le documentEnvoyer cette page par mail Partagez cet article Facebook Twitter Linked In Google+ Viadeo
  • Number of hours

    • Lectures : 4.0
    • Tutorials : 4.0
    • Laboratory works : 8.0
    • Projects : ?
    • Internship : ?
    ECTS : 1.0

Goals

The course aims to enable students to assimilate the basic knowledge necessary for the integration of microsystems blocks in an integrated circuit.

Contact Libor RUFER

Content

Micro Electro-Mechanical Systems (MEMS)
• Microsystems fabrication technology
• Components of microsystems and their modeling
• Sensors and different electromechanical coupling effects
• Microelectronic Interfaces
• Accelerometers
• Pressure sensors
• Actuators and different electromechanical coupling effects
• Micro-optical devices
• RF MEMS



Prerequisites

Physics, electronics

Tests



Additional Information

Curriculum->ALTERNANCE MT->Semester 9

Bibliography

• V. Kaajakari, Practical MEMS, Small Gear Publishing, 2009, 478 pp.
• S. D. Senturia, Microsystem Design, Kluwer Academic Publishers, 2001, 689 pp.
• M. H. Bao, Micro Mechanical Transducers, Elsevier, 2000, 378 pp.
• S. Mir (Ed.) Conception des microsystèmes sur silicium. Traité EGEM (Electronique, Génie Electrique, Microsystèmes). Hermes Science Publications, Paris, France, 224 pages, 2002.
• S. Mir (Ed.) Dispositifs et physique des microsystèmes sur silicium. Traité EGEM (Electronique, Génie Electrique, Microsystèmes). Hermes Science Publications, Paris, France, 224 pages, 2002.

A+Augmenter la taille du texteA-Réduire la taille du texteImprimer le documentEnvoyer cette page par mail Partagez cet article Facebook Twitter Linked In Google+ Viadeo

Date of update March 6, 2019

Grenoble INP Institut d'ingénierie Univ. Grenoble Alpes