School of engineering in Physics, Applied Physics, Electronics & MaterialsScience
Learning the whole process flow in microtechnology production lines.
Lectures to introduce the clean-room practical works.
Knowledge in material science for thin films
Semester 9 - The exam is given in english only
Semester 9 - This course is given in english only
Handbook of semiconductor manufacturing technology, R. Doering, Y. Nishi, Ed. CRC Press Inc., 2007
Date of update July 24, 2015