Number of hours
- Laboratory works 20.0
ECTS
ECTS 1.5
Goal(s)
The aim of this practice is to realize electronic devices in the clean-room environment with the help of the microelectronic technology.
Contact Celine TERNONContent(s)
The practice is composed of two 8 hours sessions in the clean-room:
During the practice, the student will realise transistors and MEMS, discovering the main technology processes :
- thermal treatments (annealing, oxidation)
- deposit techniques (sputtering, evaporation)
- photolithography
- dry and wet etching
Prerequisites
none
Test
A short report explaining results obtained is asked.
French State controlled diploma conferring a Master's degree
