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CIME labwork (clean room & characterization) - 4PMBCIM9

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  • Number of hours

    • Laboratory works : 24.0
    ECTS : 2.0

Goals

During this practice, the students will modelize, realize and characterize electronic devices.

Contact Alice CAPLIER

Content

The practice is made of three 8 hours periods :

  • Silvaco simulation (8h) :
    It aims to modelize the process flow leading to transistors
  • Clean room (8h) :*
    It aims in fabricating capacities and diodes, discovering the main technology processes :
  • thermal treatments (annealing, oxidation)
  • deposit techniques (sputtering, evaporation)
  • photolithography
  • dry and wet etching
  • Characterization (8h) :*
    During this session, the devices fabricated in clean-room will be characterized :
  • current-voltage measurement on PN diodes and MOS transistors
  • capacity-voltage measurement on MOS capacities
  • physical and electrical parameters extraction


Prerequisites

Module "Technologie des dispositfs"
4PMBTDS9

Tests

For each session a short report explaining results obtained is asked.



Additional Information

Curriculum->BIOMED->Semester 4

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Université Grenoble Alpes