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Our engineering & Master degrees
Our engineering & Master degrees

> Studies > Engineering degree

Elaboration of integrated circuits

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  • Number of hours

    • Lectures : 10.0
    • Tutorials : 8.0
    ECTS : 2.0

Goals

This course presents the process flow for the elaboration of integrated circuits and microsystems. The material-related issues and the process limitations are also discussed. A failure analysis approach is also performed.

TO SEE FICHE 3A-SIM 5PMMECI1


Contact Fabien VOLPI

Content

General introduction. Presentation of standard process flow in microelectronics. reminders on usual notions (miniaturisation, integration, Front-End, Back-End,...).

A standard CMOS structure is used to illustrate the succesion of process steps.
Each process class is developped in order to point-out their advantage, drawbacks, limitations, state-of-the-art techniques,...

  • Cleaning - Drying
  • Deposition - Growth
  • Photolithography
  • Etching
  • Doping
  • SOI

Specific processes for microsystems (Micro-machining)

TO SEE FICHE 3A-SIM 5PMMECI1



Prerequisites

Teaching methods : Lectures
Language : Classes and assessment in English; Bibliography in English

TO SEE FICHE 3A-SIM 5PMMECI1

Tests

The exam is given in english only 

Written exam (usually on scientific article)

TO SEE FICHE 3A-SIM 5PMMECI1



Additional Information

This course is given in english only EN

Curriculum->Internationals Cursus->Semester 5
Curriculum->Master RI FAME->Semester 5

Bibliography

  • Silicon processing for the VLSI era. (vol.1 & 2), Stanley Wolf, Richard N. Tauber Edition, 2nd ed, Sunset Beach, Calif : Lattice Press (2000)
  • Silicon VLSI Technology: Fundamentals, Practice and Modeling, James D. Plummer, Michael Deal, Peter Griffin, Ed Prentice Hall (2000)
  • The Science and Engineering of Microelectronic Fabrication, Stephen A. Campbell, Ed Oxford University Press Inc, 2nd revised edition (2003)
  • Reliability and Failure of Electronic Materials and Devices, Milton Ohring, Ed Academic Press Inc (1998)
  • Handbook of Semiconductor Manufacturing Technology, Robert Doering, Yoshio Nishi, Ed CRC Press Inc, 2nd Revised edition (2007)

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Université Grenoble Alpes