School of engineering in Physics, Applied Physics, Electronics & Materials
This course presents the process flow in the field of microtechnologies (microelectronics, microsystems, biotechnologies,...). The material-related issues and the process limitations are also discussed. A failure analysis approach is also performed.
* General introduction. Presentation of standard process flow in microelectronics. reminders on usual notions (miniaturisation, integration, Front-End, Back-End,...).
* A standard CMOS structure is used to illustrate the succesion of process steps.
* Each process class is developped in order to point-out their advantage, drawbacks, limitations, state-of-the-art techniques,...
* Cleaning - Drying
* Deposition - Growth
* Specific processes for microsystems (Micro-machining)
The exam is given in english only
Written exam (2h)
Silicon processing for the VLSI era. (vol.1 & 2), Stanley Wolf, Richard N. Tauber Edition, 2nd ed, Sunset Beach, Calif : Lattice Press (2000)
Silicon VLSI Technology: Fundamentals, Practice and Modeling, James D. Plummer, Michael Deal, Peter Griffin, Ed Prentice Hall (2000)
The Science and Engineering of Microelectronic Fabrication, Stephen A. Campbell, Ed Oxford University Press Inc, 2nd revised edition (2003
Reliability and Failure of Electronic Materials and Devices, Milton Ohring, Ed Academic Press Inc (1998)
Handbook of Semiconductor Manufacturing Technology, Robert Doering, Yoshio Nishi, Ed CRC Press Inc, 2nd Revised edition (2007)