Number of hours
- Lectures 10.0
- Tutorials 8.0
ECTS
ECTS 2.0
Goal(s)
This course presents the process flow for the elaboration of integrated circuits and microsystems. The material-related issues and the process limitations are also discussed. A failure analysis approach is also performed.
TO SEE FICHE 3A-SIM 5PMMECI1
Contact Fabien VOLPI
Content(s)
General introduction. Presentation of standard process flow in microelectronics. reminders on usual notions (miniaturisation, integration, Front-End, Back-End,...).
A standard CMOS structure is used to illustrate the succesion of process steps.
Each process class is developped in order to point-out their advantage, drawbacks, limitations, state-of-the-art techniques,...
- Cleaning - Drying
- Deposition - Growth
- Photolithography
- Etching
- Doping
- SOI
Specific processes for microsystems (Micro-machining)
TO SEE FICHE 3A-SIM 5PMMECI1
Prerequisites
Teaching methods : Lectures
Language : Classes and assessment in English; Bibliography in English
TO SEE FICHE 3A-SIM 5PMMECI1
Test
The exam is given in english only 
Written exam (usually on scientific article)
TO SEE FICHE 3A-SIM 5PMMECI1
Additional Information
This course is given in english only
Course list
Curriculum->Internationals Cursus->Semester 5
Curriculum->Master RI FAME->Semester 5
Bibliography
- Silicon processing for the VLSI era. (vol.1 & 2), Stanley Wolf, Richard N. Tauber Edition, 2nd ed, Sunset Beach, Calif : Lattice Press (2000)
- Silicon VLSI Technology: Fundamentals, Practice and Modeling, James D. Plummer, Michael Deal, Peter Griffin, Ed Prentice Hall (2000)
- The Science and Engineering of Microelectronic Fabrication, Stephen A. Campbell, Ed Oxford University Press Inc, 2nd revised edition (2003)
- Reliability and Failure of Electronic Materials and Devices, Milton Ohring, Ed Academic Press Inc (1998)
- Handbook of Semiconductor Manufacturing Technology, Robert Doering, Yoshio Nishi, Ed CRC Press Inc, 2nd Revised edition (2007)
French State controlled diploma conferring a Master's degree
