Number of hours
- Lectures 12.0
- Tutorials 12.0
ECTS
ECTS 1.5
Goal(s)
How to synthetize refractory material for industry (bulk and thin films) from a liquid or a gas phase.
Niveau : Advanced material science and mass transport
Contact Raphael BOICHOTContent(s)
A - Liquid phase material synthesis
- 1. Theory
- Phase diagramms
- Solidification front theory
- 2. Industrial processes
- Examples of processes for silicon synthesis for photovoltaic and microelectronic industry.
B - Gas phase material synthesis
- 1. Theory
- Industrial situation of refractory material synthesis
- Multi-physics and multi-components heat and mass tranfer : equations and phenomena
- Basis of homogeneous and heterogeneous kinetic
- Gas mixture thermodynamic
- Cristal growth thermodynamic
- 2. Industrial processes
- Physical Vapor Transport (PVT)
- Physical Vapor Deposition (PVD)
- Chemical Vapor Deposition (CVD)
- Atomic Layer Deposition (ALD)
Prerequisites
Material science, Heat transfer and Mass transport
Test
Written exam (2h)
Additional Information
Course list
Curriculum->Master-Recherche->Semester 4
Curriculum->EPEE->Semester 4
Curriculum->Master Electrochimie et Procédés->Semester 4
Bibliography
Svehla : NASA technical report R-132
Bird, Stewart, Lightfoot : Transport Phenomena
Taylor, Krishna : Multicomponent Mass Transfer
Galerie : Traitement de surface en phase vapeur
Hitchman, Jensen : Chemical Vapor Deposition
ChemKin III et Surface Chemkin manuals
Gardiner : Combustion Chemistry