Number of hours
- Lectures 8.0
ECTS
ECTS 0.5
Goal(s)
The aim of this course is to familiarize students with the technological operations necessary for the elaboration of integrated circuits (CMOS process). The course is related to lab experiments in clean room (microelectronic components will be realized, physical and electrical characterization will be done, and process simulation on work stations will complete the teaching in this module)
Contact Irina IONICA
Content(s)
Lecture on the basics of technology for microelectronic (CMOS integration and clean room environment):
· Thermal treatments,
· Deposition methods (CVD, sputterinf, evaporation) ;
· Doping ( Ion implantation., thermal diffusion) ;
· Lithography ; Etching ; ULSI integration,
· Electrical and physical characterization
Prerequisites
Test
Written exam
Bibliography
S. M. Sze : Semiconductor Devices : Physics and Technology (Wiley, 1985 & 2001). Dispositifs et Circuits intégrés semiconducteurs, Physique et Technologie, A. Vapaille (Bordas, 1993)
French State controlled diploma conferring a Master's degree
