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Our engineering & Master degrees
Our engineering & Master degrees

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Microsystems - 4PMNMIC4

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  • Number of hours

    • Lectures : 10.0
    • Tutorials : 10.0
    ECTS : 2.0

Goals

Introduction to the concept of microsystems to show the wide variety of fields of physics exploited in R & D to integrate on a single silicon chip, sensors, actuators and signal processing.

Understand why magnetic interactions often benefit from scale reduction laws:

  • fields and gradients generated by magnets and conductors,
  • volumic force density between these elements.
    Understand how such iteractions are exploited in MEMS.
  • what materials, how they are integrated
    Discover various applications :
  • both in R&D and in coercialy available devices.
Contact Orphee CUGAT, Nathalie MATHIEU

Content

The lecture is divided in 2 parts :

1° part :
Introduction to the concept of microsystems
Microtechnology
Microsensors
Microactuators

2° part :
Introduction to magnetic interactions.
Scale reduction laws for magnets and coils:
Fields, gradients, force density.
Admissible current density.
Intégration of micro-coils and micro-magnets:
fabrication, limits.
Diamagnetism and levitation.
Smart materials
Examples of Mag-MEMS (R&D, commercial devices)



Prerequisites

Microelectronic Fabrication
Semiconductor Physics and Devices
Basic magnetism and electricity classes from standard scientific education.
Some neurons in working order.
A little bit of imagination.

Tests

2h written exam



examen écrit en fin d'année 1 heure

Additional Information

Curriculum->PNS->Semester 4

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Université Grenoble Alpes