Number of hours
- Lectures 10.0
- Tutorials 10.0
ECTS
ECTS 2.0
Goal(s)
Introduction to the concept of microsystems to show the wide variety of fields of physics exploited in R & D to integrate on a single silicon chip, sensors, actuators and signal processing.
Understand why magnetic interactions often benefit from scale reduction laws:
- fields and gradients generated by magnets and conductors,
- volumic force density between these elements.
Understand how such iteractions are exploited in MEMS. - what materials, how they are integrated
Discover various applications : - both in R&D and in coercialy available devices.
Content(s)
The lecture is divided in 2 parts :
1° part :
Introduction to the concept of microsystems
Microtechnology
Microsensors
Microactuators
2° part :
Introduction to magnetic interactions.
Scale reduction laws for magnets and coils:
Fields, gradients, force density.
Admissible current density.
Intégration of micro-coils and micro-magnets:
fabrication, limits.
Diamagnetism and levitation.
Smart materials
Examples of Mag-MEMS (R&D, commercial devices)
Prerequisites
Microelectronic Fabrication
Semiconductor Physics and Devices
Basic magnetism and electricity classes from standard scientific education.
Some neurons in working order.
A little bit of imagination.
2h written exam
examen écrit en fin d'année 1 heure