Phelma Formation 2022

Thin film processing

  • Number of hours

    • Lectures 10.0
    • Tutorials 6.0

    ECTS

    ECTS 1.5

Goal(s)

This course presents the wide panel of techniques used for the elaboration of these films. Physical and physico-chemical aspects of the techniques are presented.

TO SEE FICHE 2A-SIM 4PMMEFI9


Contact Fabien VOLPI

Content(s)

  • Elaboration techniques for thin films : CVD, PVD, MBE, ALD, plasma processes, spin-coating,…
  • Vacuum techniques


Prerequisites

Teaching methods : 16h Theoretical classes (T) and problems
Language : Classes and assessment in English, Bibliography In English.

Test

The exam is given in english only 

Closed-book Final Exam



Additional Information

This course is given in english only EN

Course list
Curriculum->Internationals Cursus->Semester 4
Curriculum->Master RI FAME->Semester 4

Bibliography

  • Hitchman M.L. & Jensen K.F., CVD: Principles and Applications, Acad. Press, London, 1992
  • Ohring M., The Material Science of Thin Films, Academic Press, London, 1992