Number of hours
- Lectures 10.0
- Tutorials 6.0
ECTS
ECTS 1.5
Goal(s)
This course presents the wide panel of techniques used for the elaboration of these films. Physical and physico-chemical aspects of the techniques are presented.
TO SEE FICHE 2A-SIM 4PMMEFI9
Contact Fabien VOLPI
Content(s)
- Elaboration techniques for thin films : CVD, PVD, MBE, ALD, plasma processes, spin-coating,…
- Vacuum techniques
Prerequisites
Teaching methods : 16h Theoretical classes (T) and problems
Language : Classes and assessment in English, Bibliography In English.
Test
The exam is given in english only
Closed-book Final Exam
Additional Information
This course is given in english only
Course list
Curriculum->Internationals Cursus->Semester 4
Curriculum->Master RI FAME->Semester 4
Bibliography
- Hitchman M.L. & Jensen K.F., CVD: Principles and Applications, Acad. Press, London, 1992
- Ohring M., The Material Science of Thin Films, Academic Press, London, 1992