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Materials processing - 4PMPGEM2

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  • Number of hours

    • Lectures : 12.0
    • Tutorials : 12.0
    ECTS : 1.5

Goals

How to synthetize refractory material for industry (bulk and thin films) from a liquid or a gas phase.

Niveau : Advanced material science and mass transport

Contact Raphael BOICHOT

Content

A - Liquid phase material synthesis

  • 1. Theory
    • Phase diagramms
    • Solidification front theory
  • 2. Industrial processes
    • Examples of processes for silicon synthesis for photovoltaic and microelectronic industry.

B - Gas phase material synthesis

  • 1. Theory
    • Industrial situation of refractory material synthesis
    • Multi-physics and multi-components heat and mass tranfer : equations and phenomena
    • Basis of homogeneous and heterogeneous kinetic
    • Gas mixture thermodynamic
    • Cristal growth thermodynamic
  • 2. Industrial processes
    • Physical Vapor Transport (PVT)
    • Physical Vapor Deposition (PVD)
    • Chemical Vapor Deposition (CVD)
    • Atomic Layer Deposition (ALD)


Prerequisites

Material science, Heat transfer and Mass transport

Tests

Written exam (2h)



Additional Information

Curriculum->Master-Recherche->Semester 4
Curriculum->EPEE->Semester 4
Curriculum->Master Electrochimie et Procédés->Semester 4

Bibliography

Svehla : NASA technical report R-132
Bird, Stewart, Lightfoot : Transport Phenomena
Taylor, Krishna : Multicomponent Mass Transfer
Galerie : Traitement de surface en phase vapeur
Hitchman, Jensen : Chemical Vapor Deposition
ChemKin III et Surface Chemkin manuals
Gardiner : Combustion Chemistry

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