CAD for microsystems - 4PMTMSD2

Goal(s)

The course will give basic principles of micro-electromechanical systems modelling. Starting from microsystem simple mechanical elements, the course will develop the modelling of more complex structures including electromechanical transducers. Approaches to reduced-order modelling of complex microstructures will be explained and the electromechanical and electroacoustic analogies will be studied in detail. Basic electromechanical transduction mechanisms will be described; their analogy models will be developed and applied to examples of real microsystems. Among the transduction mechanisms will be both reciprocal principles as electrostatic, piezoelectric, electromagnetic and electrodynamic, and non-reciprocal principles as piezoresistive and thermomechanical.

Content(s)

1. Introduction
2. Continuous mechanical systems – static behavior
3. Continuous mechanical systems – dynamic behavior
4. Discrete systems: electro-mechanical and electro-acoustic analogies
5. Acoustic elements - air damping
6. Electro-mechanical transducers modeling: electrostatic transduction
7. Piezoelectric transduction
8. Electromechanical transduction with magnetic field
9. Non-reciprocal transducers - Piezoresistive transduction

Solid background in general physics