Phelma Formation 2022

Clean room based fabrication

  • Number of hours

    • Laboratory works 8

    ECTS

    ECTS 1

Goal(s)

Trainings in a cleanroom environment will be practiced with 8 hours dedicated to the clean-room presentation and the fabrication of diodes or MOM capacitors. A short report together with a questionnaire to fill in during the lab will be marked.

Responsible(s)

Florence Podevin  florence.podevin@phelma.grenoble-inp.fr

Content(s)

Fabrication process in clean-room. Practival work sessions.


Test

The exam is given in english only
1 written exam, 1 hour
1 report + questionnaire on the practical lab

Final mark= 0.5 (exam) + 0.5 (practical lab report + questionnaire)


Additional Information

Lecture is given in English only.

Bibliography

Materials (1, 2), processes (1,2), MEMS (3,4) and Graphene (5)
1. R. Levy, “Microelectronic Materials and Processes,
2. C. Grovenor, “Microelectronic materials”
3. G. Rebeiz, “RF MEMS, theory, Design , and Technologies, Wiley.
4. Mohamed Gad-el-Hak, “MEMS Introduction and Fundamentals”, The MEMS Handbook 2nd Ed.
5. J. Ramsden, “Nanotechnology, an introduction”, Elsevier