Informations générales
Number of hours
- Laboratory works 8
ECTSECTS
1
Goal(s)
Trainings in a cleanroom environment will be practiced with 8 hours dedicated to the clean-room presentation and the fabrication of diodes or MOM capacitors. A short report together with a questionnaire to fill in during the lab will be marked.
Responsible(s)
Florence Podevin florence.podevin@phelma.grenoble-inp.fr
Content(s)
Fabrication process in clean-room. Practival work sessions.
Test
The exam is given in english only
1 written exam, 1 hour
1 report + questionnaire on the practical lab
Final mark= 0.5 (exam) + 0.5 (practical lab report + questionnaire)
Additional Information
Lecture is given in English only.
Bibliography
Materials (1, 2), processes (1,2), MEMS (3,4) and Graphene (5)
1. R. Levy, “Microelectronic Materials and Processes,
2. C. Grovenor, “Microelectronic materials”
3. G. Rebeiz, “RF MEMS, theory, Design , and Technologies, Wiley.
4. Mohamed Gad-el-Hak, “MEMS Introduction and Fundamentals”, The MEMS Handbook 2nd Ed.
5. J. Ramsden, “Nanotechnology, an introduction”, Elsevier
French State controlled Master's degree
