EU Functional materials and thin films - 4PUMMFCM

Goal(s)

Acquire scientific and technical knowledge on functional materials and/or in thin films : elaboration processes (in thin films or single crystals), microstructures and microstructural evolutions, and properties.

Content(s)

1) Elaboration of thin films and bulk single crystals (22h)

• Thin films: Elaboration by PVD and CVD processes (12h)
  • Deposition technologies and relevant parameters
  • Epitaxial processes for single-crystal thin films
  • CVD and derivatives
  • Use of thermodynamic diagrams and calculations in CVD
• Process of bulk single crystals (10h)
  • Crystal growth technology
  • Effect of growth parameters on the defects observed in the grown crystals.

2) Materials science for thin films (14h)

• Specificities of small-scale materials
• Thermodynamic considerations: surface/interface energies, elastic energy, etc.
• What is the link between the magnitudes that can actually be modulated by the engineer and the film produced?
• Mechanics of thin films, residual stresses
• Microstructural evolution of thin films under mechanical stress (voids, hillocks and wiskers)
• Stresses in semiconductors (stress anisotropy, epitaxy, doped layers, etc.)

3) Microstructure - Functional properties (8h)

• In-depth study of the “Structure and Properties” course in S7
• Focus on case studies