Number of hours
- Lectures 4.0
- Projects 0
- Tutorials 4.0
- Internship 0
- Laboratory works 0
ECTS
ECTS 0.5
Content(s)
Lectures to introduce the clean-room practical works.
Introduction to Microtechnology process flow
Main trends,...
Microtechnology process flow step by step
Cleaning/drying, Thin film deposition, Photolithography, Etching, Ion implantation
Timeline of a chip fabrication
Prerequisites
Knowledge in material science for thin films
Test
Semester 9 - The exam is given in english only 
On-site : Written exam (1h)/ Lecture documents and calculator allowed.
Remote : Written exam (1h+30 min for remote organisation)/ Lecture documents and calculator allowed / Subject downloaded on Chamilo - Exam supervised from your webcam through Zoom interface - Written sheets scanned and uploaded on the Chamilo folder "Travaux". In case of technical problem it can be sent by an other service.
100% written exam
Additional Information
This course brings 2.0 ECTS to students in UE From material to device (1)
Semester 9 - This course is given in english onlyCourse list
Curriculum->Engineering degree->Semester 9
Curriculum->Apprentissage MEP->Semester 9
Curriculum->Internationals Cursus->Semester 9
Bibliography
Handbook of semiconductor manufacturing technology, R. Doering, Y. Nishi, Ed. CRC Press Inc., 2007