Number of hours
- Lectures 8.0
- Tutorials 6.0
ECTS
ECTS 1.5
Goal(s)
This course presents the relations between processes, microstructures and properties of these thin films.
TO SEE FICHE 2A-SIM 4PMMSFI9
Contact Fabien VOLPI
Content(s)
- Basic notions on thin film elaborations :
- Introduction to relation between processes / microstructures / properties
- Impact of physical, chemical or thermodynamic parameters on elaboration mechanisms
- Link between experimental parameters and the elaborated film
- Mechanics of thin films
- Microstructural evolution of thin films (voids, hillocks, wiskers,…)
- Stress and semiconductor processing
Prerequisites
Teaching methods : 14h Theoretical classes (T) and problems
Language : Classes and assessment in English, Bibliography In English.
Test
The exam is given in english only 
Closed-book Final Exam
Additional Information
This course is given in english only
Course list
Curriculum->Internationals Cursus->Semester 4
Curriculum->Master RI FAME->Semester 4
Bibliography
Tu KN, Mayer JW, Feldman LC, Ohring M, Electronic thin film science, McMillan
Freund LB, Suresh S, Thin film materials, stress defect formation & surface evolution
French State controlled diploma conferring a Master's degree
