Phelma Formation 2022

Design and Characterization of compo. - 3PMRRCC4

  • Number of hours

    • Lectures 4.0
    • Projects 0
    • Tutorials 4.0
    • Internship 0
    • Laboratory works 24.0
    • Written tests 0


    ECTS 2.0


This course aims to familiarize students with technological operations as well as the physical modeling of the various physical phenomena occurring during the development of integrated circuits (NMOS sector), in connection with the clean room and electrical characterization labs.

Contact Panagiota MORFOULI, Irina IONICA


Introduction of CMOS integration and clean room; thermal treatments; deposits (CVD, sputtering, evaporation, etc.); doping (ion implantation, diffusion); lithography; etching; process integration.
Practical work in clean room
Electrical characterization of different active components (MOS capacitors, transistors, diodes, etc.)



For the lecture:

  • session 1: written homework
  • session 2: written homework
    For the labs: written reports

note finale = 1/5 DM + 2/5 CR salle blanche +2/5 CR carac elec

Additional Information

Course list
Curriculum->Alternance MT->Semester 5


• S.M. Sze : Semiconductor devices: Physics and Technology (2nd Ed., J. Wiley, 2002).