Phelma Formation 2022

Electrochemistry for microsystems - 5PMPELM1

  • Number of hours

    • Lectures 12.0
    • Projects 0
    • Tutorials 12.0
    • Internship 0
    • Laboratory works 0
    • Written tests 0

    ECTS

    ECTS 2.0

Goal(s)

The aim is to show how electrochemistry is used in the microelectronics industry. Electrochemical deposition processes are more specifically described, to illustrate how electrochemical processes can be advantageously used to tackle specific challenges in micro- and nanofabrication.

Contact Paul Henri HAUMESSER

Content(s)

A - Micro- and nanotechnologies (4h CM)

  • AI - History and evolution of microelectronic devices
  • AII - Overview of the various processes for micro- and nanofabrication

B - Electrochemical deposition processes (8h CM)

  • BI - Copper electroplating
  • BII - Electroless deposition

C - Practical sessions (12h TD)
Small groups of 3-4 students work together on case studies based on works reported in the literature. Each team works on a specific theme, establishing first its state-of-the-art, then focusing on a critical analysis of a few publications or patents



Prerequisites

Good knowledge of the fundamental thermodynamics and kinetics of electrochemical reactions.

Test

Written report and oral presentation of the subject selected for the practical sessions.



La note prend en compte le travail de groupe (qualité du rapport et de la présentation), mais aussi la participation et l'implication de chaque étudiant(e)

Additional Information

Curriculum->Engineering degree->Semester 9
Curriculum->Apprentissage MEP->Semester 9
Curriculum->Master->Semester 9

Bibliography

Haumesser, P.-H. Nucleation and Growth of Metals; Haumesser, P.-H., Ed.; Elsevier: Oxford, 2016.