Electrochemistry for microsystems - 5PMPELM1

Informations générales

  • Number of hours

    • Lectures 12.0
    • Projects 0
    • Tutorials 12.0
    • Internship 0
    • Laboratory works 0
    • Written tests 0

    ECTS

    ECTS 2.0

Goal(s)

The aim is to show how electrochemistry is used in the microelectronics industry. Electrochemical deposition processes are more specifically described, to illustrate how electrochemical processes can be advantageously used to tackle specific challenges in micro- and nanofabrication.

Contact Paul Henri HAUMESSER, Pierre Antoine BONNEFONT, Raphael BOICHOT, Nicolas SERGENT, Lenka SVECOVA, Florence DRUART

Content(s)

A - Micro- and nanotechnologies (4h CM)

  • AI - History and evolution of microelectronic devices
  • AII - Overview of the various processes for micro- and nanofabrication

B - Electrochemical deposition processes (8h CM)

  • BI - Copper electroplating
  • BII - Electroless deposition

C - Practical sessions (12h TD)
Small groups of 3-4 students work together on case studies based on works reported in the literature. Each team works on a specific theme, establishing first its state-of-the-art, then focusing on a critical analysis of a few publications or patents



Prerequisites

Good knowledge of the fundamental thermodynamics and kinetics of electrochemical reactions.

Test

Written report and oral presentation of the subject selected for the practical sessions.



Additional Information

Course list
Curriculum->Master->Semester 9

Bibliography

Haumesser, P.-H. Nucleation and Growth of Metals; Haumesser, P.-H., Ed.; Elsevier: Oxford, 2016.