Basic notions on thin film elaborations : -Introduction to relation between processes / microstructures / properties -Impact of physical, chemical or thermodynamic parameters on elaboration mechanisms -Link between experimental parameters and the elaborated film -Mechanics of thin films Microstructural evolution of thin films (voids, hillocks, wiskers,…) Stress and semiconductor processing
Written exam (2h). Documents authorized.
This course brings 2.0 ECTS to students in UE Applied materials S8
This course brings 2.0 ECTS to students in UE Fundamentals of mat. science III