Number of hours
- Lectures 7.0
- Projects 0
- Tutorials 7.0
- Internship 0
- Laboratory works 0
- Written tests 0
ECTS
ECTS 1.5
Goal(s)
Microelectronic systems are constituted of the accumulation of processed thin films. This course presents the relations between processes, microstructures and properties of these thin films.
Contact Fabien VOLPIContent(s)
Basic notions on thin film elaborations :
-Introduction to relation between processes / microstructures / properties
-Impact of physical, chemical or thermodynamic parameters on elaboration mechanisms
-Link between experimental parameters and the elaborated film
-Mechanics of thin films
Microstructural evolution of thin films (voids, hillocks, wiskers,…)
Stress and semiconductor processing
Prerequisites
Test
Semester 8 - The exam may be taken in french or in english 
On-site : Written exam (2h)/ Lecture documents and calculator allowed.
Remote : Written exam (2h+30 min for remote organisation)/ Lecture documents and calculator allowed / Subject downloaded on Chamilo - Exam supervised from your webcam through Zoom interface - Written sheets scanned and uploaded on the Chamilo folder "Travaux". In case of technical problem it can be sent by an other service.
Examen écrit 100%
Additional Information
This course brings 1.0 ECTS to students in UE Materials and Processes
This course brings 2.0 ECTS to students in UE Modelling tools and applications
This course brings 1.5 ECTS to students in UE 7 Applied Materials S8
This course brings 2.0 ECTS to students in UE Fundamentals of mat. science III
Semester 8 - This course may be followed in french or in english Course list
Curriculum->Apprentissage MEP->Semester 8
Curriculum->SIM->Semester 8
Curriculum->Degree Advanced Materials (AM)->Semester 8
Curriculum->Internationals Cursus->Semester 8