Phelma Formation 2022

MEMS - 5PMRMEM6

  • Number of hours

    • Lectures 4.0
    • Projects ?
    • Tutorials 4.0
    • Internship ?
    • Laboratory works 8.0

    ECTS

    ECTS 1.0

Goal(s)

The course aims to enable students to assimilate the basic knowledge necessary for the integration of microsystems blocks in an integrated circuit.

Contact Libor RUFER

Content(s)

Micro Electro-Mechanical Systems (MEMS)
• Microsystems fabrication technology
• Components of microsystems and their modeling
• Sensors and different electromechanical coupling effects
• Microelectronic Interfaces
• Accelerometers
• Pressure sensors
• Actuators and different electromechanical coupling effects
• Micro-optical devices
• RF MEMS



Prerequisites

Physics, electronics

Test



Additional Information

Course list
Curriculum->ALTERNANCE MT->Semester 9

Bibliography

• V. Kaajakari, Practical MEMS, Small Gear Publishing, 2009, 478 pp.
• S. D. Senturia, Microsystem Design, Kluwer Academic Publishers, 2001, 689 pp.
• M. H. Bao, Micro Mechanical Transducers, Elsevier, 2000, 378 pp.
• S. Mir (Ed.) Conception des microsystèmes sur silicium. Traité EGEM (Electronique, Génie Electrique, Microsystèmes). Hermes Science Publications, Paris, France, 224 pages, 2002.
• S. Mir (Ed.) Dispositifs et physique des microsystèmes sur silicium. Traité EGEM (Electronique, Génie Electrique, Microsystèmes). Hermes Science Publications, Paris, France, 224 pages, 2002.