Forming processes - Micro-Nanotechnologies - 5PMMMNA4

Informations générales

  • Number of hours

    • Lectures 4.0
    • Projects 0
    • Tutorials 4.0
    • Internship 0
    • Laboratory works 0

    ECTS

    ECTS 0.5

Goal(s)

The aim of this course is to describe the process flow for micro- and nano-technologies.

Contact Pierre Antoine BONNEFONT, Alexis DESCHAMPS, Fabien VOLPI

Content(s)

Course/Tutorial
After a general presentation of the industrial context, all the technological steps are reviewed one by one (cleaning, thin film deposition, photolithography, etching, ion implantation). The strengths and weaknesses of the various techniques are discussed, in the light of the physical chemistry of the processes involved. Finally, a full device is virtually fabricated during a tutorial.



Prerequisites

Semiconductor physics
Materials science for thin films
Processing techniques for thin films

Test

Session 1: Written exam (Calculator and documents allowed)
Session 2: Written exam (Calculator and documents allowed)



Additional Information

Course list
Curriculum->SIM->Semester 9
Curriculum->MEP Learning->Semester 9