Lithography - 5PMNPHO1

Goal(s)

The objective of this lecture is to show an over-view of the lithography techniques used in micro-electronics industry today. Some advanced solutions for the fabrication of the future devices are also discussed.

Content(s)

• Introduction to lithography (definitions, objectives, classifications ...)
• Optical lithography (steps, exposition and alignment systems, optics for lithography, resolution enhancement techniques, immersion lithography, extreme-UV lithography…)
  - Introduction to advanced lithography techniques (e-beam, nano-imprint)

some concepts of microelectronics fabrication technology