Number of hours
- Lectures 10.0
- Projects 0
- Tutorials 10.0
- Internship 0
- Laboratory works 0
ECTS
ECTS 3.0
Goal(s)
The aim of this course is to describe the process flow for micro- and nano-technologies.
Contact Lionel BASTARD, Fabien VOLPI, Benoit BOULANGERContent(s)
Course/Tutorial
After a general presentation of the industrial context, all the technological steps are reviewed one by one (cleaning, thin film deposition, photolithography, etching, ion implantation). The strengths and weaknesses of the various techniques are discussed, in the light of the physical chemistry of the processes involved. Finally, a full device is virtually fabricated during a tutorial.
Prerequisites
Semiconductor physics
Materials science for thin films
Processing techniques for thin films
Test
Written exam of 2h.
All documents distributed for the course and handwritten notes are permitted.
Calculator allowed.
The exam subject is available in English, and student can write answers in English.
N1=10%CC+90%EXAM1
N2=EXAM2
Additional Information
Course list
Curriculum->Double-Diploma Engineer/Master->Semester 9
Curriculum->Master->Semester 9
Bibliography
A full course handout in English is available.