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Our engineering & Master degrees

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Process flow for microtechnologies - 5PMFFFM6

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  • Number of hours

    • Lectures : 4.0
    • Tutorials : 4.0
    • Laboratory works : 0
    • Projects : 0
    • Internship : 0
    ECTS : 2.0

Goals

Learning the whole process flow in microtechnology production lines.

Contact Fabien VOLPI

Content

Lectures to introduce the clean-room practical works.
Introduction to Microtechnology process flow
Main trends,...
Microtechnology process flow step by step
Cleaning/drying, Thin film deposition, Photolithography, Etching, Ion implantation
Timeline of a chip fabrication



Prerequisites

Knowledge in material science for thin films

Tests

Semester 9 - The exam is given in english only 

On-site : Written exam (1h)/ Lecture documents and calculator allowed.

Remote : Written exam (1h+30 min for remote organisation)/ Lecture documents and calculator allowed / Subject downloaded on Chamilo - Exam supervised from your webcam through Zoom interface - Written sheets scanned and uploaded on the Chamilo folder "Travaux". In case of technical problem it can be sent by an other service.



Written exam

Additional Information

Semester 9 - This course is given in english only EN

Curriculum->Internationals Cursus->Semester 9
Curriculum->Engineering degree->Semester 9

Bibliography

Handbook of semiconductor manufacturing technology, R. Doering, Y. Nishi, Ed. CRC Press Inc., 2007

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Date of update July 24, 2015

Université Grenoble Alpes