Phelma Formation 2022

Process flow for microtechnologies - 5PMFFFM6

  • Number of hours

    • Lectures 4.0
    • Projects 0
    • Tutorials 4.0
    • Internship 0
    • Laboratory works 0


    ECTS 2.0


Learning the whole process flow in microtechnology production lines.

Contact Fabien VOLPI


Lectures to introduce the clean-room practical works.
Introduction to Microtechnology process flow
Main trends,...
Microtechnology process flow step by step
Cleaning/drying, Thin film deposition, Photolithography, Etching, Ion implantation
Timeline of a chip fabrication


Knowledge in material science for thin films


Semester 9 - The exam is given in english only 

On-site : Written exam (1h)/ Lecture documents and calculator allowed.

Remote : Written exam (1h+30 min for remote organisation)/ Lecture documents and calculator allowed / Subject downloaded on Chamilo - Exam supervised from your webcam through Zoom interface - Written sheets scanned and uploaded on the Chamilo folder "Travaux". In case of technical problem it can be sent by an other service.

Written exam

Additional Information

Semester 9 - This course is given in english only EN

Course list
Curriculum->Internationals Cursus->Semester 9
Curriculum->Engineering degree->Semester 9


Handbook of semiconductor manufacturing technology, R. Doering, Y. Nishi, Ed. CRC Press Inc., 2007