Process flow for microtechnologies - 5PMFFFM6
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Number of hours
- Lectures : 4.0
- Tutorials : 4.0
- Laboratory works : 0
- Projects : 0
- Internship : 0
ECTS : 2.0
Goals
Learning the whole process flow in microtechnology production lines.
Contact Fabien VOLPI
Content Lectures to introduce the clean-room practical works.
Introduction to Microtechnology process flow
Main trends,...
Microtechnology process flow step by step
Cleaning/drying, Thin film deposition, Photolithography, Etching, Ion implantation
Timeline of a chip fabrication
PrerequisitesKnowledge in material science for thin films
Tests Semester 9 - The exam is given in english only 
On-site : Written exam (1h)/ Lecture documents and calculator allowed.
Remote : Written exam (1h+30 min for remote organisation)/ Lecture documents and calculator allowed / Subject downloaded on Chamilo - Exam supervised from your webcam through Zoom interface - Written sheets scanned and uploaded on the Chamilo folder "Travaux". In case of technical problem it can be sent by an other service.
Written exam
Additional Information Semester 9 - This course is given in english only 
Curriculum->Internationals Cursus->Semester 9
Curriculum->Engineering degree->Semester 9
Bibliography Handbook of semiconductor manufacturing technology, R. Doering, Y. Nishi, Ed. CRC Press Inc., 2007
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Date of update July 24, 2015