Lectures to introduce the clean-room practical works. Introduction to Microtechnology process flow Main trends,... Microtechnology process flow step by step Cleaning/drying, Thin film deposition, Photolithography, Etching, Ion implantation Timeline of a chip fabrication
Knowledge in material science for thin films
Semester 9 - The exam is given in english only
On-site : Written exam (1h)/ Lecture documents and calculator allowed.
Remote : Written exam (1h+30 min for remote organisation)/ Lecture documents and calculator allowed / Subject downloaded on Chamilo - Exam supervised from your webcam through Zoom interface - Written sheets scanned and uploaded on the Chamilo folder "Travaux". In case of technical problem it can be sent by an other service.