Process flow for microtechnologies - 5PMFFFM6

Lectures to introduce the clean-room practical works.
Introduction to Microtechnology process flow
Main trends,...
Microtechnology process flow step by step
Cleaning/drying, Thin film deposition, Photolithography, Etching, Ion implantation
Timeline of a chip fabrication

Knowledge in material science for thin films

Semester 9 - The exam is given in english only 

On-site : Written exam (1h)/ Lecture documents and calculator allowed.

Remote : Written exam (1h+30 min for remote organisation)/ Lecture documents and calculator allowed / Subject downloaded on Chamilo - Exam supervised from your webcam through Zoom interface - Written sheets scanned and uploaded on the Chamilo folder "Travaux". In case of technical problem it can be sent by an other service.

Written exam

Semester 9 - This course is given in english only 

Handbook of semiconductor manufacturing technology, R. Doering, Y. Nishi, Ed. CRC Press Inc., 2007