Phelma Formation 2022

Filière de fabrication en microtechnologies - 5PMFFFM6

  • Volumes horaires

    • CM 4.0
    • Projet 0
    • TD 4.0
    • Stage 0
    • TP 0

    Crédits ECTS

    Crédits ECTS 2.0


Learning the whole process flow in microtechnology production lines.

Contact Fabien VOLPI


Lectures to introduce the clean-room practical works.
Introduction to Microtechnology process flow
Main trends,...
Microtechnology process flow step by step
Cleaning/drying, Thin film deposition, Photolithography, Etching, Ion implantation
Timeline of a chip fabrication


Knowledge in material science for thin films

Contrôle des connaissances

Semestre 9 - L'examen existe uniquement en anglais 

On-site : Written exam (1h)/ Lecture documents and calculator allowed.

Remote : Written exam (1h+30 min for remote organisation)/ Lecture documents and calculator allowed / Subject downloaded on Chamilo - Exam supervised from your webcam through Zoom interface - Written sheets scanned and uploaded on the Chamilo folder "Travaux". In case of technical problem it can be sent by an other service.

Written exam

Informations complémentaires

Semestre 9 - Le cours est donné uniquement en anglais EN

Cursus ingénieur->Cursus Internationaux->Semestre 9
Cursus ingénieur->Filières->Semestre 9


Handbook of semiconductor manufacturing technology, R. Doering, Y. Nishi, Ed. CRC Press Inc., 2007