Phelma Formation 2022

TP : Micro and Nanosystems - 4PMTMNL2

  • Number of hours

    • Lectures 0
    • Projects 0
    • Tutorials 0
    • Internship 0
    • Laboratory works 32.0
    • Written tests ?


    ECTS 3.0


The objectives of this course is to provide a pratical training in microtechnology.

Contact Aurelien KUHN, Irina IONICA


The course contains four kinds of labs : Technology labs in clean room (T); characterization labs for microelectronic devices (C); AFM and nanocharacterization (N); simulation of microtechnology processes, microelectronic and MEMS devices (S).


Basic knowledge in microelectronic and microtechnology


Semester 8 - The exam is given in english only 

It is evaluated by combined exam

the final mark is the average of the marks obtained in each module

Additional Information

Semester 8 - This course is given in english only EN

Course list
Curriculum->Engineering degree->Semester 8