Volumes horaires
- CM 0
- Projet 0
- TD 0
- Stage 0
- TP 32.0
- DS ?
Crédits ECTS
Crédits ECTS 3.0
Objectif(s)
The objectives of this course is to provide a pratical training in microtechnology.
Contact Aurelien KUHN, Clemens WINKELMANN, Maryline BAWEDINContenu(s)
The course contains four kinds of labs : Technology labs in clean room (T); characterization labs for microelectronic devices (C); AFM and nanocharacterization (N); simulation of microtechnology processes, microelectronic and MEMS devices (S).
Prérequis
Basic knowledge in microelectronic and microtechnology
Contrôle des connaissances
Semestre 8 - L'examen existe uniquement en anglais 
It is evaluated by combined exam
the final mark is the average of the marks obtained in each module
M=(S+T+C+N)/4
Informations complémentaires
Semestre 8 - Le cours est donné uniquement en anglais
Cursus ingénieur->Filière NANOTECH->Semestre 8